Alex Robinson

Publications

  1. 2015
  2. Published

    Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

    Richard Palmer, Andreas Frommhold, Alex Robinson, , , , & , 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  3. Published

    Optimisation of patterned illumination to improve depth estimation from a plenoptic camera

    Ela Claridge, Nadine Meyer, Kai Bongs, Alex Robinson & Iain Styles, 7 Jun 2015, Proceedings of Adaptive Optics: Analysis, Methods and Systems, AO 2015. Optical Society of America, p. JT5A.41 JT5A-41

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  4. 2016
  5. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, , , Alex Robinson & , 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  6. Published

    Performance of a high resolution chemically amplified electron beam resist at various beam energies

    Richard Palmer, , Andreas Frommhold, , , , , & Alex Robinson, 2 Apr 2016, In: Microelectronic Engineering. 155, p. 97-101

    Research output: Contribution to journalArticlepeer-review

  7. Published
  8. Published

    Overview of Materials and Processes for Lithgography

    Alex Robinson, 18 Nov 2016, Materials and Processes for Next Generation Lithography. 1 ed. United Kingdom, Vol. 11. p. 1-90 (Frontiers of Nanoscience; vol. 11).

    Research output: Chapter in Book/Report/Conference proceedingChapter

  9. 2017
  10. Published
  11. Published
  12. Published
  13. Published

    Multi-trigger resist for electron beam lithography

    Wolfgang Theis, Alex Robinson, , , , , , (ed.) & (ed.), 28 Sep 2017, Proceedings of the SPIE. Society of Photo-Optical Instrumentation Engineers, Vol. 10446. 1044608. (SPIE - International Society for Optical Engineering. Proceedings; vol. 10446).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  14. 2018
  15. Published

    High-resolution EUV lithography using a multi-trigger resist

    Wolfgang Theis, & Alex Robinson, 19 Mar 2018, Extreme Ultraviolet (EUV) Lithography IX. A. Goldberg, K. (ed.). Society of Photo-Optical Instrumentation Engineers, 105831L. (Proceedings of SPIE; vol. 10583).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  16. 2020
  17. Published

    Cisplatin adducts of DNA as precursors for nanostructured catalyst materials

    Ruba Hendi, , Neil Rees, Alex Robinson & Jim Tucker, 24 Aug 2020, In: Nanoscale Advances. 2, 10, p. 4491-4497 7 p.

    Research output: Contribution to journalArticlepeer-review

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