Alex Robinson

Publications

  1. 2020
  2. Published
  3. 2018
  4. Published

    High-resolution EUV lithography using a multi-trigger resist

    Wolfgang Theis & Alex Robinson, 19 Mar 2018, Extreme Ultraviolet (EUV) Lithography IX. A. Goldberg, K. (ed.). Society of Photo-Optical Instrumentation Engineers, 105831L. (Proceedings of SPIE; vol. 10583).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  5. 2017
  6. Published

    Multi-trigger resist for electron beam lithography

    Wolfgang Theis, Alex Robinson, (ed.) & (ed.), 28 Sep 2017, Proceedings of the SPIE. Society of Photo-Optical Instrumentation Engineers, Vol. 10446. 1044608. (SPIE - International Society for Optical Engineering. Proceedings; vol. 10446).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  7. Published
  8. Published
  9. Published
  10. 2016
  11. Published

    Overview of Materials and Processes for Lithgography

    Alex Robinson, 18 Nov 2016, Materials and Processes for Next Generation Lithography. 1 ed. United Kingdom, Vol. 11. p. 1-90 (Frontiers of Nanoscience; vol. 11).

    Research output: Chapter in Book/Report/Conference proceedingChapter

  12. Published
  13. Published
  14. E-pub ahead of print
  15. 2015
  16. Published

    Organic hard masks utilizing fullerene derivatives

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Organic hard masks utilizing fullerene derivatives.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  17. Published

    Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  18. Published

    Improving depth estimation from a plenoptic camera by patterned illumination

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Proceedings of the SPIE. Remondino, F. & Shortis, M. (eds.). Society of Photo-Optical Instrumentation Engineers, Vol. 9528. p. 952815-952815-6 (Proceedings of SPIE; vol. 9528).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  19. Published

    Towards Plenoptic Multi-View Imaging

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Imaging and Applied Optics 2015. Optical Society of America, JT5A.42

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  20. 2014
  21. Published

    Chemically amplified phenolic fullerene electron beam resist

    Richard Palmer & Alex Robinson, 28 Feb 2014, In : Journal of Materials Chemistry C. 2, 8, p. 1505-1512

    Research output: Contribution to journalArticle

  22. 2013
  23. Published

    Spin on Hard-mask material

    Alex Robinson, Andreas Frommhold, 15 Aug 2013, Patent No. WO/2013/117908

    Research output: Patent

  24. Published
  25. Published
  26. Published
  27. 2012
  28. Published
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