Alex Robinson

Publications

  1. 2020
  2. Published
  3. 2018
  4. Published

    High-resolution EUV lithography using a multi-trigger resist

    Wolfgang Theis & Alex Robinson, 19 Mar 2018, Extreme Ultraviolet (EUV) Lithography IX. A. Goldberg, K. (ed.). Society of Photo-Optical Instrumentation Engineers, 105831L. (Proceedings of SPIE; vol. 10583).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  5. 2017
  6. Published

    Multi-trigger resist for electron beam lithography

    Wolfgang Theis, Alex Robinson, (ed.) & (ed.), 28 Sep 2017, Proceedings of the SPIE. Society of Photo-Optical Instrumentation Engineers, Vol. 10446. 1044608. (SPIE - International Society for Optical Engineering. Proceedings; vol. 10446).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  7. Published
  8. Published
  9. Published
  10. 2016
  11. Published

    Overview of Materials and Processes for Lithgography

    Alex Robinson, 18 Nov 2016, Materials and Processes for Next Generation Lithography. 1 ed. United Kingdom, Vol. 11. p. 1-90 (Frontiers of Nanoscience; vol. 11).

    Research output: Chapter in Book/Report/Conference proceedingChapter

  12. Published
  13. Published
  14. E-pub ahead of print
  15. 2015
  16. Published

    Organic hard masks utilizing fullerene derivatives

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Organic hard masks utilizing fullerene derivatives.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  17. Published

    Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  18. Published

    Improving depth estimation from a plenoptic camera by patterned illumination

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Proceedings of the SPIE. Remondino, F. & Shortis, M. (eds.). Society of Photo-Optical Instrumentation Engineers, Vol. 9528. p. 952815-952815-6 (Proceedings of SPIE; vol. 9528).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  19. Published

    Towards Plenoptic Multi-View Imaging

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Imaging and Applied Optics 2015. Optical Society of America, JT5A.42

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  20. 2014
  21. Published

    Chemically amplified phenolic fullerene electron beam resist

    Richard Palmer & Alex Robinson, 28 Feb 2014, In : Journal of Materials Chemistry C. 2, 8, p. 1505-1512

    Research output: Contribution to journalArticle

  22. 2013
  23. Published

    Spin on Hard-mask material

    Alex Robinson, Andreas Frommhold, 15 Aug 2013, Patent No. WO/2013/117908

    Research output: Patent

  24. Published
  25. Published
  26. Published
  27. 2012
  28. Published
  29. 2011
  30. Published
  31. Published
  32. Published
  33. Published
  34. 2010
  35. Published

    Fabrication of co-axial field emitter tips for scanning probe energy loss spectroscopy

    Alex Robinson & Richard Palmer, 1 Apr 2010, In : Nanotechnology. 21, 15, p. 155304 1 p.

    Research output: Contribution to journalArticle

  36. Published

    Scanning probe energy loss spectroscopy with microfabricated coaxial tips

    James Lawton, Alex Robinson & Richard Palmer, 1 Apr 2010, In : Physical Review B. 81, 16, p. 161411 1 p.

    Research output: Contribution to journalArticle

  37. Published
  38. Published
  39. 2009
  40. Published

    Direct Electron-Beam Writing of Highly Conductive Wires in Functionalized Fullerene Films

    Mayandithevar Manickam, Jon Preece & Alex Robinson, 4 Dec 2009, In : Small. 5, 23, p. 2750-2755 6 p.

    Research output: Contribution to journalArticle

  41. Published

    Low Activation Energy Fullerene Molecular Resist

    Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 1 Jan 2009.

    Research output: Contribution to conference (unpublished)Paper

  42. Published

    The Nucleus

    Alex Robinson, 1 Jan 2009, In : Electron Beam Irradiation of C60(OH)10. 47, p. 267 1 p.

    Research output: Contribution to journalArticle

  43. 2008
  44. Published

    A high resolution water soluble fullerene molecular resist for electron beam lithography

    Richard Palmer & Alex Robinson, 9 Jul 2008, In : Nanotechnology. 19, 27, p. 275308-

    Research output: Contribution to journalArticle

  45. Published

    Fullerene Resist Materials for the 32 nm Node and Beyond

    Alex Robinson, Richard Palmer, Sara Diegoli, Mayandithevar Manickam & Jon Preece, 9 Jul 2008, In : Advanced Functional Materials. 18, 13, p. 1977-1982 6 p.

    Research output: Contribution to journalArticle

  46. Published
  47. Published

    Chemically amplified fullerene resists for e-beam lithography

    Sara Diegoli, Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 1 Jan 2008.

    Research output: Contribution to conference (unpublished)Paper

  48. Published
  49. 2007
  50. Published

    A Chemically Amplified Fullerene-Derivative Molecular Electron-Beam Resist

    Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 3 Dec 2007, In : Small. 3, 12, p. 2076 1 p.

    Research output: Contribution to journalArticle

  51. Published
  52. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In : Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  53. 2006
  54. Published
  55. Published

    Chemically amplified molecular resists for electron beam lithography

    Alex Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece, 1 Apr 2006, p. 1115-1118. 4 p.

    Research output: Contribution to conference (unpublished)Paper

  56. Published
  57. 2005
  58. Published
  59. Published
  60. 2000
  61. Published
  62. Published

    A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

    Alex Robinson, Richard Palmer, Jon Preece & Ken Harris, 1 Jun 2000, p. 425-428. 4 p.

    Research output: Contribution to conference (unpublished)Paper

  63. Published

    New high resolution liquid crystal electron beam resists

    Alex Robinson, Jon Preece & Ken Harris, 1 Jan 2000, p. 129-134. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  64. Published

    Systematic studies of fullerene derivative electron beam resists

    Alex Robinson, Richard Palmer, Douglas Philp & Jon Preece, 1 Jan 2000, p. 115-120. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  65. 1999
  66. Published

    Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography

    Alex Robinson, Richard Palmer & Jon Preece, 1 Jan 1999, p. 219-224. 6 p.

    Research output: Contribution to conference (unpublished)Paper