Alex Robinson

Publications

  1. Abstract › Research › Not peer-reviewed
  2. Published
  3. Chapter › Research
  4. Published

    Overview of Materials and Processes for Lithgography

    Alex Robinson, 18 Nov 2016, Materials and Processes for Next Generation Lithography. 1 ed. United Kingdom, Vol. 11. p. 1-90 (Frontiers of Nanoscience; vol. 11).

    Research output: Chapter in Book/Report/Conference proceedingChapter

  5. Conference contribution › Research
  6. Published

    High-resolution EUV lithography using a multi-trigger resist

    Wolfgang Theis & Alex Robinson, 19 Mar 2018, Extreme Ultraviolet (EUV) Lithography IX. A. Goldberg, K. (ed.). Society of Photo-Optical Instrumentation Engineers, 105831L. (Proceedings of SPIE; vol. 10583).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  7. Published

    Improving depth estimation from a plenoptic camera by patterned illumination

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Proceedings of the SPIE. Remondino, F. & Shortis, M. (eds.). Society of Photo-Optical Instrumentation Engineers, Vol. 9528. p. 952815-952815-6 (Proceedings of SPIE; vol. 9528).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  8. Published

    Multi-trigger resist for electron beam lithography

    Wolfgang Theis, Alex Robinson, (ed.) & (ed.), 28 Sep 2017, Proceedings of the SPIE. Society of Photo-Optical Instrumentation Engineers, Vol. 10446. 1044608. (SPIE - International Society for Optical Engineering. Proceedings; vol. 10446).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  9. Published

    Organic hard masks utilizing fullerene derivatives

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Organic hard masks utilizing fullerene derivatives.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  10. Published

    Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

    Richard Palmer, Andreas Frommhold, Alex Robinson, 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  11. Published

    Towards Plenoptic Multi-View Imaging

    Ela Claridge, Alex Robinson, Kai Bongs & Iain Styles, 2015, Imaging and Applied Optics 2015. Optical Society of America, JT5A.42

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  12. Paper › Research › Not peer-reviewed
  13. Published

    A triphenylene derivative as a novel negative/positive tone resist of 10 nanometer resolution

    Alex Robinson, Richard Palmer, Jon Preece & Ken Harris, 1 Jun 2000, p. 425-428. 4 p.

    Research output: Contribution to conference (unpublished)Paper

  14. Published

    Chemically amplified fullerene resists for e-beam lithography

    Sara Diegoli, Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 1 Jan 2008.

    Research output: Contribution to conference (unpublished)Paper

  15. Published

    Chemically amplified molecular resists for electron beam lithography

    Alex Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece, 1 Apr 2006, p. 1115-1118. 4 p.

    Research output: Contribution to conference (unpublished)Paper

  16. Published

    Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography

    Alex Robinson, Richard Palmer & Jon Preece, 1 Jan 1999, p. 219-224. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  17. Published

    Low Activation Energy Fullerene Molecular Resist

    Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 1 Jan 2009.

    Research output: Contribution to conference (unpublished)Paper

  18. Published

    New high resolution liquid crystal electron beam resists

    Alex Robinson, Jon Preece & Ken Harris, 1 Jan 2000, p. 129-134. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  19. Published
  20. Published

    Systematic studies of fullerene derivative electron beam resists

    Alex Robinson, Richard Palmer, Douglas Philp & Jon Preece, 1 Jan 2000, p. 115-120. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  21. Article › Research › Not peer-reviewed
  22. Published

    A Chemically Amplified Fullerene-Derivative Molecular Electron-Beam Resist

    Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 3 Dec 2007, In : Small. 3, 12, p. 2076 1 p.

    Research output: Contribution to journalArticle

  23. Published

    A high resolution water soluble fullerene molecular resist for electron beam lithography

    Richard Palmer & Alex Robinson, 9 Jul 2008, In : Nanotechnology. 19, 27, p. 275308-

    Research output: Contribution to journalArticle

  24. Published
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  28. Published
  29. Published
  30. Published
  31. Published

    Direct Electron-Beam Writing of Highly Conductive Wires in Functionalized Fullerene Films

    Mayandithevar Manickam, Jon Preece & Alex Robinson, 4 Dec 2009, In : Small. 5, 23, p. 2750-2755 6 p.

    Research output: Contribution to journalArticle

  32. Published

    Fabrication of co-axial field emitter tips for scanning probe energy loss spectroscopy

    Alex Robinson & Richard Palmer, 1 Apr 2010, In : Nanotechnology. 21, 15, p. 155304 1 p.

    Research output: Contribution to journalArticle

  33. Published

    Fullerene Resist Materials for the 32 nm Node and Beyond

    Alex Robinson, Richard Palmer, Sara Diegoli, Mayandithevar Manickam & Jon Preece, 9 Jul 2008, In : Advanced Functional Materials. 18, 13, p. 1977-1982 6 p.

    Research output: Contribution to journalArticle

  34. Published
  35. Published
  36. Published

    Scanning probe energy loss spectroscopy with microfabricated coaxial tips

    James Lawton, Alex Robinson & Richard Palmer, 1 Apr 2010, In : Physical Review B. 81, 16, p. 161411 1 p.

    Research output: Contribution to journalArticle

  37. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In : Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  38. Published

    The Nucleus

    Alex Robinson, 1 Jan 2009, In : Electron Beam Irradiation of C60(OH)10. 47, p. 267 1 p.

    Research output: Contribution to journalArticle

  39. Published
  40. Article › Research › Peer-reviewed
  41. Published

    Chemically amplified phenolic fullerene electron beam resist

    Richard Palmer & Alex Robinson, 28 Feb 2014, In : Journal of Materials Chemistry C. 2, 8, p. 1505-1512

    Research output: Contribution to journalArticle

  42. Published
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  44. Published
  45. E-pub ahead of print
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  51. Published
  52. Published
  53. Patent › Research
  54. Published
  55. Published
  56. Published

    Spin on Hard-mask material

    Alex Robinson, Andreas Frommhold, 15 Aug 2013, Patent No. WO/2013/117908

    Research output: Patent