Alex Robinson

Publications

  1. Published
  2. Published

    Positive tone chemically amplified fullerene resist

    Andreas Frommhold, , , Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2012, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  3. Published

    Scanning probe energy loss spectroscopy with microfabricated coaxial tips

    James Lawton, Alex Robinson & Richard Palmer, 1 Apr 2010, In: Physical Review B. 81, 16, p. 161411 1 p.

    Research output: Contribution to journalArticle

  4. Published
  5. Published

    Spin on Hard-mask material

    Alex Robinson, Andreas Frommhold & , 15 Aug 2013, Patent No. WO/2013/117908

    Research output: Patent

  6. Published
  7. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  8. Published

    Systematic studies of fullerene derivative electron beam resists

    Alex Robinson, Richard Palmer, , , , Douglas Philp & Jon Preece, 1 Jan 2000, p. 115-120. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  9. Published

    The Nucleus

    Alex Robinson, 1 Jan 2009, In: Electron Beam Irradiation of C60(OH)10. 47, p. 267 1 p.

    Research output: Contribution to journalArticle

  10. Published

    Towards 11nm half-pitch resolution for a negative-tone chemically amplified molecular resist platform for extreme-ultraviolet lithography

    Richard Palmer, Andreas Frommhold, Alex Robinson, , , , & , 20 Mar 2015, Advances in Patterning Materials and Processes XXXI.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution