Alex Robinson

Publications

  1. Published

    Multi-trigger resist for electron beam lithography

    Wolfgang Theis, Alex Robinson, , , , , , (ed.) & (ed.), 28 Sep 2017, Proceedings of the SPIE. Society of Photo-Optical Instrumentation Engineers, Vol. 10446. 1044608. (SPIE - International Society for Optical Engineering. Proceedings; vol. 10446).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  2. Published

    New high resolution liquid crystal electron beam resists

    Alex Robinson, , , , , Jon Preece & Ken Harris, 1 Jan 2000, p. 129-134. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  3. Published

    Optimisation of patterned illumination to improve depth estimation from a plenoptic camera

    Ela Claridge, Nadine Meyer, Kai Bongs, Alex Robinson & Iain Styles, 7 Jun 2015, Proceedings of Adaptive Optics: Analysis, Methods and Systems, AO 2015. Optical Society of America, p. JT5A.41 JT5A-41

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  4. Published

    Organic hard masks utilizing fullerene derivatives

    Richard Palmer, Andreas Frommhold, Alex Robinson, & , 20 Mar 2015, Organic hard masks utilizing fullerene derivatives.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  5. Published

    Overview of Materials and Processes for Lithgography

    Alex Robinson, 18 Nov 2016, Materials and Processes for Next Generation Lithography. 1 ed. United Kingdom, Vol. 11. p. 1-90 (Frontiers of Nanoscience; vol. 11).

    Research output: Chapter in Book/Report/Conference proceedingChapter

  6. Published

    Performance of a high resolution chemically amplified electron beam resist at various beam energies

    Richard Palmer, , Andreas Frommhold, , , , , & Alex Robinson, 2 Apr 2016, In: Microelectronic Engineering. 155, p. 97-101

    Research output: Contribution to journalArticlepeer-review

  7. Published
  8. Published
  9. Published
  10. Published

    Plasma etching of high-resolution features in a fullerene molecular resist

    Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2011, Proceedings of SPIE - The International Society for Optical Engineering.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution