Alex Robinson

Publications

  1. Published
  2. Published

    High-resolution EUV lithography using a multi-trigger resist

    Wolfgang Theis, & Alex Robinson, 19 Mar 2018, Extreme Ultraviolet (EUV) Lithography IX. A. Goldberg, K. (ed.). Society of Photo-Optical Instrumentation Engineers, 105831L. (Proceedings of SPIE; vol. 10583).

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

  3. Published

    Electron beam induced fragmentation of fullerene derivatives

    Alex Robinson, , , , Jon Preece, Douglas Philp, & , 1998, In: Chemical Physics Letters.

    Research output: Contribution to journalArticlepeer-review

  4. Published

    New high resolution liquid crystal electron beam resists

    Alex Robinson, , , , , Jon Preece & Ken Harris, 1 Jan 2000, p. 129-134. 6 p.

    Research output: Contribution to conference (unpublished)Paper

  5. Published

    Chemically amplified molecular resists for electron beam lithography

    Alex Robinson, , , Richard Palmer, Mayandithevar Manickam, Jon Preece, , & , 1 Apr 2006, p. 1115-1118. 4 p.

    Research output: Contribution to conference (unpublished)Paper

  6. Published
  7. Published

    Spin on Hard-mask material

    Alex Robinson, Andreas Frommhold & , 15 Aug 2013, Patent No. WO/2013/117908

    Research output: Patent

  8. Published

    Exposure mechanism of fullerene derivative electron beam resists

    Alex Robinson, , , , , Douglas Philp & Jon Preece, 1999, In: Chemical Physics Letters.

    Research output: Contribution to journalArticlepeer-review

  9. Published
  10. Published

    Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography

    Alex Robinson, Richard Palmer, , , & Jon Preece, 1 Jan 1999, p. 219-224. 6 p.

    Research output: Contribution to conference (unpublished)Paper