Proceedings of SPIE - The International Society for Optical Engineering, 0277-786X

Journal

Publications

  1. 2017
  2. Published

    Irresistible Materials multi-trigger resist: the journey towards high volume manufacturing readiness

    Montgomery, W., McClelland, A., Ure, D., Roth, J. & Alex Robinson, 18 May 2017, In : Proceedings of SPIE - The International Society for Optical Engineering. 10143, 13 p., 1014328.

    Research output: Contribution to journalArticle

  3. Published
  4. Published

    Sensitivity enhancement of the high-resolution xMT multi-trigger resist for EUV lithography

    Popescu, C., Andreas Frommhold, McClelland, A., Roth, J., Ekinci, Y. & Alex Robinson, 18 May 2017, In : Proceedings of SPIE - The International Society for Optical Engineering. 10143, 9 p., 101430v.

    Research output: Contribution to journalArticle

  5. 2012
  6. Published

    Chemical Structure Recognition: A Rule Based Approach

    Sadawi, N., Alan Sexton & Volker Sorge, 1 Jan 2012, In : Proceedings of SPIE - The International Society for Optical Engineering. 8297, 82970E.

    Research output: Contribution to journalArticle

  7. Published
  8. 2011
  9. Published
  10. 2010
  11. Published
  12. Published

    Development of net-shape piezoelectric actuators for large X-ray optics

    Sanmartin, DR., Dou Zhang, Tim Button, Meggs, C., Atkins, C., Doel, P., Brooks, D., Feldman, C., Willingale, R., James, A., Willis, G. & Smith, A., 1 Jan 2010, In : Proceedings of SPIE - The International Society for Optical Engineering. 7803, 78030M.

    Research output: Contribution to journalArticle

  13. Published

    Development of spider micro-structured optical arrays for X-ray optics

    Sanmartin, DR., Dou Zhang, Tim Button, Meggs, C., Atkins, C., Doel, P., Brooks, D., Feldman, C., Willingale, R., Michette, A., Pfauntsch, S., Sahraei, S., Shand, M., James, A., Willis, G., Dunare, C., Stevenson, T., Parkes, W. & Smith, A., 1 Jan 2010, In : Proceedings of SPIE - The International Society for Optical Engineering. 7803, 780306.

    Research output: Contribution to journalArticle

  14. 2009
  15. Published

    Progress on the development of active micro-structured optical arrays for X-ray optics

    Sanmartin, DR., Dou Zhang, Button, T., Atkins, C., Doel, P., Wang, H., Brooks, D., Feldman, C., Willingale, R., Michette, A., Pfauntsch, S., Sahraei, S., Shand, M., James, A., Dunare, C., Stevenson, T., Parkes, W. & Smith, A., 1 Jan 2009, In : Proceedings of SPIE - The International Society for Optical Engineering. 7448, 744808.

    Research output: Contribution to journalArticle

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