Microelectron Engineering, 0167-9317

Journal

31 - 40 out of 49Page size: 10

Publications

  1. 2008
  2. Published

    Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker

    Mayandithevar Manickam, Jon Preece, Richard Palmer & Alex Robinson, 1 Jul 2008, In: Microelectronic Engineering. 85, 7, p. 1540-1544 5 p.

    Research output: Contribution to journal › Article

  3. Published

    A micromagnetoflowcell for microfluidic measurements

    Phil Prewett, Graham Davies, James Bowen, 1 May 2008, In: Microelectronic Engineering. 85, 5-6, p. 1062-1065 4 p.

    Research output: Contribution to journal › Article › peer-review

  4. Published

    Development and validation of functional imprint material for the step and flash imprint lithography process

    Stefan Dimov, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 850 1 p.

    Research output: Contribution to journal › Article

  5. Published

    Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

    Stefan Dimov, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 853-855 3 p.

    Research output: Contribution to journal › Article

  6. Published

    Optimization of a novel micro-opto-X-ray imaging lens

    Phil Prewett, Kyle Jiang, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 1086-1088 3 p.

    Research output: Contribution to journal › Article

  7. Published

    Chemically amplified molecular resists for e-beam lithography

    Sara Diegoli, Mayandithevar Manickam, Jon Preece, Rebecca Palmer & Alex Robinson, 2008, In: Microelectronic Engineering.

    Research output: Contribution to journal › Article › peer-review

  8. 2007
  9. Published

    Embedded metal mask enhanced evanescent near field optical lithography

    Phil Prewett, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 729-732 4 p.

    Research output: Contribution to journal › Article

  10. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journal › Article

  11. Published

    Fabrication of Ni-Al2O3 composite microcomponent by electroforming

    Xueyong Wei, Phil Prewett & Kyle Jiang, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1256-1259 4 p.

    Research output: Contribution to journal › Article

  12. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journal › Article

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