Microelectron Engineering, 0167-9317

Journal

Publications

  1. Article › Research › Peer-reviewed
  2. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, Alex Robinson, 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  3. Published
  4. Published

    Instabilities in Focused Ion Beam-patterned Au nanowires

    Phil Prewett, 1 Sep 2011, In: Microelectron Engineering. 88, 9, p. 2840-2843 4 p.

    Research output: Contribution to journalArticlepeer-review

  5. Published

    Nanopatterning of metallic features over uniformed arrays of microbowl structures

    Ali Mohammadkhani, Hany Hassanin, Carl Anthony & Kyle Jiang, 1 Oct 2012, In: Microelectronic Engineering. 98, p. 266-269 4 p.

    Research output: Contribution to journalArticlepeer-review

  6. Published
  7. Published

    The effects of dwell time on focused ion beam machining of silicon

    Aydin Sabouri, Carl Anthony, James Bowen & Phil Prewett, 2014, In: Microelectronic Engineering. p. 24-26

    Research output: Contribution to journalArticlepeer-review

  8. Published

    The focusing performance of an aperiodic double layer metallic grating

    Phil Prewett, 1 Jul 2014, In: Microelectronic Engineering. 123, p. 112-116

    Research output: Contribution to journalArticlepeer-review

  9. Letter › Research › Not peer-reviewed
  10. Published

    Electron beam lithography in passivated gold nanoclusters

    Richard Palmer, 1 Jan 2001, In: Microelectron Engineering. 57-58, p. 837-841 5 p.

    Research output: Contribution to journalLetter

  11. Special issue › Research › Peer-reviewed
  12. Published
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