Microelectron Engineering, 0167-9317

Journal

Publications

  1. Published

    Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

    Anja Wellner & Richard Palmer, 1 Jan 2001, In: Microelectronic Engineering. 57-58, p. 919-924 6 p.

    Research output: Contribution to journalArticle

  2. Published

    Fullerene-based spin-on-carbon hardmask

    1 Oct 2012, In: Microelectronic Engineering. 98, p. 552-555

    Research output: Contribution to journalArticlepeer-review

  3. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, Alex Robinson, 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  4. Published
  5. Published

    Instabilities in Focused Ion Beam-patterned Au nanowires

    Phil Prewett, 1 Sep 2011, In: Microelectron Engineering. 88, 9, p. 2840-2843 4 p.

    Research output: Contribution to journalArticlepeer-review

  6. Published

    Micro fabrication of stainless steel micro components using soft moulding and aqueous slurry

    Kyle Jiang, 1 Jan 2010, In: Microelectronic Engineering. 87, 1, p. 72-78 7 p.

    Research output: Contribution to journalArticle

  7. Published
  8. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journalArticle

  9. Published

    Multiple replication of thick PDMS micropatterns using surfactants as release agents

    Hany Hassanin & Kyle Jiang, 1 Nov 2011, In: Microelectronic Engineering. 88, 11, p. 3275-3277 3 p.

    Research output: Contribution to journalArticle

  10. Published

    Nano planar coil actuated micro paddle resonator for mass detection

    Phil Prewett, Carl Anthony & Jon Preece, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 2229-2232 4 p.

    Research output: Contribution to journalArticle