Microelectron Engineering, 0167-9317

Journal

Publications

  1. 2016
  2. Published
  3. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, Alex Robinson, 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  4. 2015
  5. Published
  6. 2014
  7. Published

    The focusing performance of an aperiodic double layer metallic grating

    Phil Prewett, 1 Jul 2014, In: Microelectronic Engineering. 123, p. 112-116

    Research output: Contribution to journalArticlepeer-review

  8. Published

    The effects of dwell time on focused ion beam machining of silicon

    Aydin Sabouri, Carl Anthony, James Bowen & Phil Prewett, 2014, In: Microelectronic Engineering. p. 24-26

    Research output: Contribution to journalArticlepeer-review

  9. 2012
  10. Published
  11. Published

    Fullerene-based spin-on-carbon hardmask

    1 Oct 2012, In: Microelectronic Engineering. 98, p. 552-555

    Research output: Contribution to journalArticlepeer-review

  12. Published

    Nanopatterning of metallic features over uniformed arrays of microbowl structures

    Ali Mohammadkhani, Hany Hassanin, Carl Anthony & Kyle Jiang, 1 Oct 2012, In: Microelectronic Engineering. 98, p. 266-269 4 p.

    Research output: Contribution to journalArticlepeer-review

  13. Published

    Bio-hybrid tactile sensor for the study of the role of mechanoreceptors in human tactile perception

    David Cheneler & Carl Anthony, 1 Sep 2012, In: Microelectronic Engineering. 97, p. 297-300 4 p.

    Research output: Contribution to journalArticlepeer-review

  14. Published

    Direct e-beam lithography of PDMS

    James Bowen, Andrew Robinson & David Cheneler, 1 Sep 2012, In: Microelectronic Engineering. 97, p. 34-37 4 p.

    Research output: Contribution to journalArticlepeer-review

  15. Published
  16. 2011
  17. Published

    Multiple replication of thick PDMS micropatterns using surfactants as release agents

    Hany Hassanin & Kyle Jiang, 1 Nov 2011, In: Microelectronic Engineering. 88, 11, p. 3275-3277 3 p.

    Research output: Contribution to journalArticle

  18. Published
  19. Published

    Instabilities in Focused Ion Beam-patterned Au nanowires

    Phil Prewett, 1 Sep 2011, In: Microelectron Engineering. 88, 9, p. 2840-2843 4 p.

    Research output: Contribution to journalArticlepeer-review

  20. Published

    A capacitive tactile sensor array for surface texture discrimination

    Carl Anthony, Mike Adams & Michael Ward, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 1811-1813 3 p.

    Research output: Contribution to journalArticle

  21. Published

    Characterization of surface properties of glass micropipettes using SEM stereoscopic technique

    Majid Malboubi & Kyle Jiang, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 2666-2670 5 p.

    Research output: Contribution to journalArticle

  22. Published
  23. Published

    Development and characterization of a bio-hybrid skin-like stretchable electrode

    Liam Grover, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 1676-1680 5 p.

    Research output: Contribution to journalArticle

  24. Published
  25. Published

    Nano planar coil actuated micro paddle resonator for mass detection

    Phil Prewett, Carl Anthony & Jon Preece, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 2229-2232 4 p.

    Research output: Contribution to journalArticle

  26. Published
  27. Published
  28. 2010
  29. Published
  30. Published

    Micro fabrication of stainless steel micro components using soft moulding and aqueous slurry

    Kyle Jiang, 1 Jan 2010, In: Microelectronic Engineering. 87, 1, p. 72-78 7 p.

    Research output: Contribution to journalArticle

  31. 2009
  32. Published

    Alumina composite suspension preparation for softlithography microfabrication

    Hany Hassanin & Kyle Jiang, 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 929-932 4 p.

    Research output: Contribution to journalArticlepeer-review

  33. Published
  34. Published
  35. Published
  36. Published

    FIB sputtering optimization using ion reverse software

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 544-547 4 p.

    Research output: Contribution to journalArticle

  37. Published

    Fabrication and validation of fused silica NIL templates incorporating different length scale features

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 705-708 4 p.

    Research output: Contribution to journalArticle

  38. 2008
  39. Published
  40. Published

    A micromagnetoflowcell for microfluidic measurements

    Phil Prewett, Graham Davies, James Bowen, 1 May 2008, In: Microelectronic Engineering. 85, 5-6, p. 1062-1065 4 p.

    Research output: Contribution to journalArticlepeer-review

  41. Published
  42. Published

    Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

    Stefan Dimov, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 853-855 3 p.

    Research output: Contribution to journalArticle

  43. Published

    Optimization of a novel micro-opto-X-ray imaging lens

    Phil Prewett, Kyle Jiang, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 1086-1088 3 p.

    Research output: Contribution to journalArticle

  44. Published
  45. 2007
  46. Published

    Embedded metal mask enhanced evanescent near field optical lithography

    Phil Prewett, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 729-732 4 p.

    Research output: Contribution to journalArticle

  47. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  48. Published

    Fabrication of Ni-Al2O3 composite microcomponent by electroforming

    Xueyong Wei, Phil Prewett & Kyle Jiang, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1256-1259 4 p.

    Research output: Contribution to journalArticle

  49. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journalArticle

  50. 2006
  51. Published

    A novel MOEMS based adaptive optic for X-ray focusing

    Phil Prewett, 1 Apr 2006, In: Microelectronic Engineering. 83, p. 1321-1325 5 p.

    Research output: Contribution to journalArticle

  52. Published
  53. Published
  54. 2004
  55. Published

    Deflection and load characterisation of bimorph actuators for bioMEMS and other applications

    Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 898-903 6 p.

    Research output: Contribution to journalArticle

  56. Published

    Design and fabrication of a micro Wankel engine using MEMS technology

    Kyle Jiang & Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 529-534 6 p.

    Research output: Contribution to journalArticle

  57. Published

    Fabrication of nanoscale vertical colloid device architectures

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 542-546 5 p.

    Research output: Contribution to journalArticle

  58. 2002
  59. Published

    Design and fabrication of colloid based vertical nanoscale devices

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jul 2002, In: Microelectronic Engineering. 61-62, p. 681-686 6 p.

    Research output: Contribution to journalArticle

  60. 2001
  61. Published

    Electron beam lithography in passivated gold nanoclusters

    Richard Palmer, 1 Jan 2001, In: Microelectron Engineering. 57-58, p. 837-841 5 p.

    Research output: Contribution to journalLetter

  62. Published

    Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

    Anja Wellner & Richard Palmer, 1 Jan 2001, In: Microelectronic Engineering. 57-58, p. 919-924 6 p.

    Research output: Contribution to journalArticle