Microelectron Engineering, ‎0167-9317

Journal

Publications

  1. 2016
  2. Published

    Performance of a high resolution chemically amplified electron beam resist at various beam energies

    Richard Palmer, , Andreas Frommhold, , , , , & Alex Robinson, 2 Apr 2016, In: Microelectronic Engineering. 155, p. 97-101

    Research output: Contribution to journalArticlepeer-review

  3. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, , , Alex Robinson & , 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  4. 2015
  5. Published
  6. 2014
  7. Published

    The focusing performance of an aperiodic double layer metallic grating

    Phil Prewett, & , 1 Jul 2014, In: Microelectronic Engineering. 123, p. 112-116

    Research output: Contribution to journalArticlepeer-review

  8. Published

    The effects of dwell time on focused ion beam machining of silicon

    Aydin Sabouri, Carl Anthony, James Bowen & Phil Prewett, 2014, In: Microelectronic Engineering. p. 24-26

    Research output: Contribution to journalArticlepeer-review

  9. 2012
  10. Published
  11. Published

    Fullerene-based spin-on-carbon hardmask

    1 Oct 2012, In: Microelectronic Engineering. 98, p. 552-555

    Research output: Contribution to journalArticlepeer-review

  12. Published

    Nanopatterning of metallic features over uniformed arrays of microbowl structures

    Ali Mohammadkhani, Hany Hassanin, Carl Anthony & Kyle Jiang, 1 Oct 2012, In: Microelectronic Engineering. 98, p. 266-269 4 p.

    Research output: Contribution to journalArticlepeer-review

  13. Published

    Bio-hybrid tactile sensor for the study of the role of mechanoreceptors in human tactile perception

    David Cheneler, & Carl Anthony, 1 Sep 2012, In: Microelectronic Engineering. 97, p. 297-300 4 p.

    Research output: Contribution to journalArticlepeer-review

  14. Published

    Direct e-beam lithography of PDMS

    James Bowen, Andrew Robinson & David Cheneler, 1 Sep 2012, In: Microelectronic Engineering. 97, p. 34-37 4 p.

    Research output: Contribution to journalArticlepeer-review

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