Microelectron Engineering, 0167-9317

Journal

Publications

  1. 2001
  2. Published

    Electron beam lithography in passivated gold nanoclusters

    Richard Palmer, 1 Jan 2001, In: Microelectron Engineering. 57-58, p. 837-841 5 p.

    Research output: Contribution to journalLetter

  3. Published

    Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

    Anja Wellner & Richard Palmer, 1 Jan 2001, In: Microelectronic Engineering. 57-58, p. 919-924 6 p.

    Research output: Contribution to journalArticle

  4. 2002
  5. Published

    Design and fabrication of colloid based vertical nanoscale devices

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jul 2002, In: Microelectronic Engineering. 61-62, p. 681-686 6 p.

    Research output: Contribution to journalArticle

  6. 2004
  7. Published

    Deflection and load characterisation of bimorph actuators for bioMEMS and other applications

    Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 898-903 6 p.

    Research output: Contribution to journalArticle

  8. Published

    Design and fabrication of a micro Wankel engine using MEMS technology

    Kyle Jiang & Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 529-534 6 p.

    Research output: Contribution to journalArticle

  9. Published

    Fabrication of nanoscale vertical colloid device architectures

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 542-546 5 p.

    Research output: Contribution to journalArticle

  10. 2006
  11. Published
  12. Published
  13. Published

    A novel MOEMS based adaptive optic for X-ray focusing

    Phil Prewett, 1 Apr 2006, In: Microelectronic Engineering. 83, p. 1321-1325 5 p.

    Research output: Contribution to journalArticle

  14. 2007
  15. Published

    Fabrication of Ni-Al2O3 composite microcomponent by electroforming

    Xueyong Wei, Phil Prewett & Kyle Jiang, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1256-1259 4 p.

    Research output: Contribution to journalArticle

  16. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journalArticle

  17. Published

    Embedded metal mask enhanced evanescent near field optical lithography

    Phil Prewett, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 729-732 4 p.

    Research output: Contribution to journalArticle

  18. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  19. 2008
  20. Published
  21. Published
  22. Published

    Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

    Stefan Dimov, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 853-855 3 p.

    Research output: Contribution to journalArticle

  23. Published

    Optimization of a novel micro-opto-X-ray imaging lens

    Phil Prewett, Kyle Jiang, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 1086-1088 3 p.

    Research output: Contribution to journalArticle

  24. Published

    A micromagnetoflowcell for microfluidic measurements

    Phil Prewett, Graham Davies, James Bowen, 1 May 2008, In: Microelectronic Engineering. 85, 5-6, p. 1062-1065 4 p.

    Research output: Contribution to journalArticlepeer-review

  25. Published
  26. 2009
  27. Published

    FIB sputtering optimization using ion reverse software

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 544-547 4 p.

    Research output: Contribution to journalArticle

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