Microelectron Engineering, 0167-9317

Journal

Publications

  1. 2009
  2. Published

    Fabrication and validation of fused silica NIL templates incorporating different length scale features

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 705-708 4 p.

    Research output: Contribution to journalArticle

  3. Published
  4. Published
  5. Published
  6. Published

    Alumina composite suspension preparation for softlithography microfabrication

    Hany Hassanin & Kyle Jiang, 1 Apr 2009, In: Microelectronic Engineering. 86, 4-6, p. 929-932 4 p.

    Research output: Contribution to journalArticlepeer-review

  7. 2010
  8. Published

    Micro fabrication of stainless steel micro components using soft moulding and aqueous slurry

    Kyle Jiang, 1 Jan 2010, In: Microelectronic Engineering. 87, 1, p. 72-78 7 p.

    Research output: Contribution to journalArticle

  9. Published
  10. 2011
  11. Published
  12. Published
  13. Published

    A capacitive tactile sensor array for surface texture discrimination

    Carl Anthony, Mike Adams & Michael Ward, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 1811-1813 3 p.

    Research output: Contribution to journalArticle