Microelectron Engineering, 0167-9317

Journal

Publications

  1. 2007
  2. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journalArticle

  3. Published

    Embedded metal mask enhanced evanescent near field optical lithography

    Phil Prewett, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 729-732 4 p.

    Research output: Contribution to journalArticle

  4. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  5. 2008
  6. Published
  7. Published
  8. Published

    Fabrication of complex 3D structures using Step and Flash Imprint Lithography (S-FIL)

    Stefan Dimov, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 853-855 3 p.

    Research output: Contribution to journalArticle

  9. Published

    Optimization of a novel micro-opto-X-ray imaging lens

    Phil Prewett, Kyle Jiang, 1 Jan 2008, In: Microelectronic Engineering. 85, 5-6, p. 1086-1088 3 p.

    Research output: Contribution to journalArticle

  10. Published

    A micromagnetoflowcell for microfluidic measurements

    Phil Prewett, Graham Davies, James Bowen, 1 May 2008, In: Microelectronic Engineering. 85, 5-6, p. 1062-1065 4 p.

    Research output: Contribution to journalArticlepeer-review

  11. Published
  12. 2009
  13. Published

    FIB sputtering optimization using ion reverse software

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 544-547 4 p.

    Research output: Contribution to journalArticle