Microelectron Engineering, 0167-9317

Journal

1 - 10 out of 49Page size: 10

Publications

  1. 2001
  2. Published

    Electron beam lithography in passivated gold nanoclusters

    Richard Palmer, 1 Jan 2001, In: Microelectron Engineering. 57-58, p. 837-841 5 p.

    Research output: Contribution to journal › Letter

  3. Published

    Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

    Anja Wellner & Richard Palmer, 1 Jan 2001, In: Microelectronic Engineering. 57-58, p. 919-924 6 p.

    Research output: Contribution to journal › Article

  4. 2002
  5. Published

    Design and fabrication of colloid based vertical nanoscale devices

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jul 2002, In: Microelectronic Engineering. 61-62, p. 681-686 6 p.

    Research output: Contribution to journal › Article

  6. 2004
  7. Published

    Deflection and load characterisation of bimorph actuators for bioMEMS and other applications

    Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 898-903 6 p.

    Research output: Contribution to journal › Article

  8. Published

    Design and fabrication of a micro Wankel engine using MEMS technology

    Kyle Jiang & Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 529-534 6 p.

    Research output: Contribution to journal › Article

  9. Published

    Fabrication of nanoscale vertical colloid device architectures

    Andrew Parker, Tony Childs & Richard Palmer, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 542-546 5 p.

    Research output: Contribution to journal › Article

  10. 2006
  11. Published

    Chemically amplified molecular resists for electron beam lithography

    Alex Robinson, Rebecca Palmer, Mayandithevar Manickam, Jon Preece, 2006, In: Microelectronic Engineering.

    Research output: Contribution to journal › Article › peer-review

  12. Published

    Chemically amplified molecular resists for electron beam lithography

    Sara Diegoli, Alex Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece, 1 Jan 2006, In: Microelectronic Engineering. 83, p. 115-118 4 p.

    Research output: Contribution to journal › Article

  13. Published

    A novel MOEMS based adaptive optic for X-ray focusing

    Phil Prewett, 1 Apr 2006, In: Microelectronic Engineering. 83, p. 1321-1325 5 p.

    Research output: Contribution to journal › Article

  14. 2007
  15. Published

    Fabrication of Ni-Al2O3 composite microcomponent by electroforming

    Xueyong Wei, Phil Prewett & Kyle Jiang, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1256-1259 4 p.

    Research output: Contribution to journal › Article

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