Microelectron Engineering, 0167-9317

Journal

Publications

  1. Published

    The effects of dwell time on focused ion beam machining of silicon

    Aydin Sabouri, Carl Anthony, James Bowen & Phil Prewett, 2014, In: Microelectronic Engineering. p. 24-26

    Research output: Contribution to journalArticlepeer-review

  2. Published

    Embedded metal mask enhanced evanescent near field optical lithography

    Phil Prewett, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 729-732 4 p.

    Research output: Contribution to journalArticle

  3. E-pub ahead of print

    Helium ion beam lithography on fullerene molecular resists for sub-10 nm patterning

    Phil Prewett, Alex Robinson, 26 Feb 2016, (E-pub ahead of print) In: Microelectronic Engineering. 155, p. 74-78

    Research output: Contribution to journalArticlepeer-review

  4. Published
  5. Published

    Fabrication of Ni-Al2O3 composite microcomponent by electroforming

    Xueyong Wei, Phil Prewett & Kyle Jiang, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1256-1259 4 p.

    Research output: Contribution to journalArticle

  6. Published

    Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers

    Anja Wellner & Richard Palmer, 1 Jan 2001, In: Microelectronic Engineering. 57-58, p. 919-924 6 p.

    Research output: Contribution to journalArticle

  7. Published
  8. Published

    FIB sputtering optimization using ion reverse software

    Stefan Dimov, 1 Jan 2009, In: Microelectronic Engineering. 86, 4-6, p. 544-547 4 p.

    Research output: Contribution to journalArticle

  9. Published

    Design and fabrication of a micro Wankel engine using MEMS technology

    Kyle Jiang & Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 529-534 6 p.

    Research output: Contribution to journalArticle

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