Microelectron Engineering, 0167-9317

Journal

Publications

  1. Published

    Deflection and load characterisation of bimorph actuators for bioMEMS and other applications

    Phil Prewett, 1 Jun 2004, In: Microelectronic Engineering. 73-74, p. 898-903 6 p.

    Research output: Contribution to journalArticle

  2. Published

    Micro-opto-electro-mechanical system for X-ray focusing

    Phil Prewett, 1 Jan 2007, In: Microelectronic Engineering. 84, 5-8, p. 1252-1255 4 p.

    Research output: Contribution to journalArticle

  3. Published

    A novel MOEMS based adaptive optic for X-ray focusing

    Phil Prewett, 1 Apr 2006, In: Microelectronic Engineering. 83, p. 1321-1325 5 p.

    Research output: Contribution to journalArticle

  4. Published

    Electron beam lithography in passivated gold nanoclusters

    Richard Palmer, 1 Jan 2001, In: Microelectron Engineering. 57-58, p. 837-841 5 p.

    Research output: Contribution to journalLetter

  5. Published

    Direct e-beam lithography of PDMS

    James Bowen, Andrew Robinson & David Cheneler, 1 Sep 2012, In: Microelectronic Engineering. 97, p. 34-37 4 p.

    Research output: Contribution to journalArticlepeer-review

  6. Published

    Development and characterization of a bio-hybrid skin-like stretchable electrode

    Liam Grover, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 1676-1680 5 p.

    Research output: Contribution to journalArticle

  7. Published
  8. Published

    Nano planar coil actuated micro paddle resonator for mass detection

    Phil Prewett, Carl Anthony & Jon Preece, 1 Aug 2011, In: Microelectronic Engineering. 88, 8, p. 2229-2232 4 p.

    Research output: Contribution to journalArticle

  9. Published

    Suppression of pinhole defects in fullerene molecular electron beam resists

    Alex Robinson, Mayandithevar Manickam & Jon Preece, 1 May 2007, In: Microelectronic Engineering. 84, 5-8, p. 1066-1070 5 p.

    Research output: Contribution to journalArticle

  10. Published
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