Microelectron Engineering, 0167-9317

Journal

Publications

  1. 2016
  2. Published
  3. E-pub ahead of print
  4. 2015
  5. Published
  6. 2014
  7. Published

    The focusing performance of an aperiodic double layer metallic grating

    Phil Prewett, 1 Jul 2014, In : Microelectronic Engineering. 123, p. 112-116

    Research output: Contribution to journalArticle

  8. Published
  9. 2012
  10. Published
  11. Published

    Fullerene-based spin-on-carbon hardmask

    1 Oct 2012, In : Microelectronic Engineering. 98, p. 552-555

    Research output: Contribution to journalArticle

  12. Published
  13. Published
  14. Published

    Direct e-beam lithography of PDMS

    James Bowen, Andrew Robinson & David Cheneler, 1 Sep 2012, In : Microelectronic Engineering. 97, p. 34-37 4 p.

    Research output: Contribution to journalArticle

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