Visual servoing schemes for automatic nanopositioning under scanning electron microscope

Naresh Marturi; Brahim Tamadazte; Sounkalo Dembélé; Nadine Piat

doi:10.1109/ICRA.2014.6906973

Visual servoing schemes for automatic nanopositioning under scanning electron microscope

Naresh Marturi
, Brahim Tamadazte
, Sounkalo Dembélé
, Nadine Piat

Metallurgy and Materials

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents two visual servoing approaches for nanopositioning in a scanning electron microscope (SEM). The first approach uses the total pixel intensities of an image as visual measurements for designing the control law. The positioning error and the platform control are directly linked with the intensity variations. The second approach is a frequency domain method that uses Fourier transform to compute the relative motion between images. In this case, the control law is designed to minimize the error i.e. The 2D motion between current and desired images by controlling the positioning platform movement. Both methods are validated at different experimental conditions for a task of positioning silicon microparts using a piezo-positioning platform. The obtained results demonstrate the efficiency and robustness of the developed methods.

Original language	English
Title of host publication	Proceedings - IEEE International Conference on Robotics and Automation
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	981-986
Number of pages	6
ISBN (Electronic)	9781479936854, 9781479936854
DOIs	https://doi.org/10.1109/ICRA.2014.6906973
Publication status	Published - 22 Sept 2014
Event	2014 IEEE International Conference on Robotics and Automation - Hong Kong, China Duration: 31 May 2014 → 7 Jun 2014 Conference number: ICRA 2014

Publication series

Name	Proceedings - IEEE International Conference on Robotics and Automation
ISSN (Print)	1050-4729

Conference

Conference	2014 IEEE International Conference on Robotics and Automation
Country/Territory	China
City	Hong Kong
Period	31/05/14 → 7/06/14

Bibliographical note

Publisher Copyright:
© 2014 IEEE.

ASJC Scopus subject areas

Software
Control and Systems Engineering
Artificial Intelligence
Electrical and Electronic Engineering

Access to Document

10.1109/ICRA.2014.6906973

Cite this

Marturi, N., Tamadazte, B., Dembélé, S., & Piat, N. (2014). Visual servoing schemes for automatic nanopositioning under scanning electron microscope. In Proceedings - IEEE International Conference on Robotics and Automation (pp. 981-986). Article 6906973 (Proceedings - IEEE International Conference on Robotics and Automation). Institute of Electrical and Electronics Engineers (IEEE). https://doi.org/10.1109/ICRA.2014.6906973

Marturi, Naresh ; Tamadazte, Brahim ; Dembélé, Sounkalo et al. / Visual servoing schemes for automatic nanopositioning under scanning electron microscope. Proceedings - IEEE International Conference on Robotics and Automation. Institute of Electrical and Electronics Engineers (IEEE), 2014. pp. 981-986 (Proceedings - IEEE International Conference on Robotics and Automation).

@inproceedings{93a02af766f84769a2e0f8958722aacd,

title = "Visual servoing schemes for automatic nanopositioning under scanning electron microscope",

abstract = "This paper presents two visual servoing approaches for nanopositioning in a scanning electron microscope (SEM). The first approach uses the total pixel intensities of an image as visual measurements for designing the control law. The positioning error and the platform control are directly linked with the intensity variations. The second approach is a frequency domain method that uses Fourier transform to compute the relative motion between images. In this case, the control law is designed to minimize the error i.e. The 2D motion between current and desired images by controlling the positioning platform movement. Both methods are validated at different experimental conditions for a task of positioning silicon microparts using a piezo-positioning platform. The obtained results demonstrate the efficiency and robustness of the developed methods.",

author = "Naresh Marturi and Brahim Tamadazte and Sounkalo Demb{\'e}l{\'e} and Nadine Piat",

note = "Publisher Copyright: {\textcopyright} 2014 IEEE.; 2014 IEEE International Conference on Robotics and Automation ; Conference date: 31-05-2014 Through 07-06-2014",

year = "2014",

month = sep,

day = "22",

doi = "10.1109/ICRA.2014.6906973",

language = "English",

series = "Proceedings - IEEE International Conference on Robotics and Automation",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

pages = "981--986",

booktitle = "Proceedings - IEEE International Conference on Robotics and Automation",

}

Marturi, N, Tamadazte, B, Dembélé, S & Piat, N 2014, Visual servoing schemes for automatic nanopositioning under scanning electron microscope. in Proceedings - IEEE International Conference on Robotics and Automation., 6906973, Proceedings - IEEE International Conference on Robotics and Automation, Institute of Electrical and Electronics Engineers (IEEE), pp. 981-986, 2014 IEEE International Conference on Robotics and Automation, Hong Kong, China, 31/05/14. https://doi.org/10.1109/ICRA.2014.6906973

Visual servoing schemes for automatic nanopositioning under scanning electron microscope. / Marturi, Naresh; Tamadazte, Brahim; Dembélé, Sounkalo et al.
Proceedings - IEEE International Conference on Robotics and Automation. Institute of Electrical and Electronics Engineers (IEEE), 2014. p. 981-986 6906973 (Proceedings - IEEE International Conference on Robotics and Automation).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Visual servoing schemes for automatic nanopositioning under scanning electron microscope

AU - Marturi, Naresh

AU - Tamadazte, Brahim

AU - Dembélé, Sounkalo

AU - Piat, Nadine

N1 - Conference code: ICRA 2014

PY - 2014/9/22

Y1 - 2014/9/22

N2 - This paper presents two visual servoing approaches for nanopositioning in a scanning electron microscope (SEM). The first approach uses the total pixel intensities of an image as visual measurements for designing the control law. The positioning error and the platform control are directly linked with the intensity variations. The second approach is a frequency domain method that uses Fourier transform to compute the relative motion between images. In this case, the control law is designed to minimize the error i.e. The 2D motion between current and desired images by controlling the positioning platform movement. Both methods are validated at different experimental conditions for a task of positioning silicon microparts using a piezo-positioning platform. The obtained results demonstrate the efficiency and robustness of the developed methods.

AB - This paper presents two visual servoing approaches for nanopositioning in a scanning electron microscope (SEM). The first approach uses the total pixel intensities of an image as visual measurements for designing the control law. The positioning error and the platform control are directly linked with the intensity variations. The second approach is a frequency domain method that uses Fourier transform to compute the relative motion between images. In this case, the control law is designed to minimize the error i.e. The 2D motion between current and desired images by controlling the positioning platform movement. Both methods are validated at different experimental conditions for a task of positioning silicon microparts using a piezo-positioning platform. The obtained results demonstrate the efficiency and robustness of the developed methods.

UR - https://www.scopus.com/pages/publications/84929178727

U2 - 10.1109/ICRA.2014.6906973

DO - 10.1109/ICRA.2014.6906973

M3 - Conference contribution

AN - SCOPUS:84929178727

T3 - Proceedings - IEEE International Conference on Robotics and Automation

SP - 981

EP - 986

BT - Proceedings - IEEE International Conference on Robotics and Automation

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 2014 IEEE International Conference on Robotics and Automation

Y2 - 31 May 2014 through 7 June 2014

ER -

Marturi N, Tamadazte B, Dembélé S, Piat N. Visual servoing schemes for automatic nanopositioning under scanning electron microscope. In Proceedings - IEEE International Conference on Robotics and Automation. Institute of Electrical and Electronics Engineers (IEEE). 2014. p. 981-986. 6906973. (Proceedings - IEEE International Conference on Robotics and Automation). doi: 10.1109/ICRA.2014.6906973

Visual servoing schemes for automatic nanopositioning under scanning electron microscope

Abstract

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Conference

Bibliographical note

ASJC Scopus subject areas

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Cite this