Abstract
Diamond-like carbon (DLC) films with a range of sp3 fractions have been examined by ultraviolet (UV) spectroscopy with 244 nm excitation. The UV Raman spectra of both hydrogenated and unhydrogenated films show the G peak near 1600 cm-1 and a broad peak around 1200 cm-1, which is attributed to C-C stretching vibrations of sp3 sites. It is found that the ratio of the intensities of the G peak and the 1200 cm-1 peak follows a universal dependence with the sp3 content in both hydrogenated and unhydrogenated DLCs. This can be used for non-destructive evaluation of the sp3 content of any DLC film.
Original language | English |
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Pages (from-to) | 541-544 |
Number of pages | 4 |
Journal | Diamond and Related Materials |
Volume | 8 |
Issue number | 2-5 |
DOIs | |
Publication status | Published - Mar 1999 |
Externally published | Yes |
Keywords
- Diamond-like carbon
- Raman
- Sp bonding
- Ta-C:H
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- General Chemistry
- Mechanical Engineering
- General Physics and Astronomy
- Materials Chemistry
- Electrical and Electronic Engineering