Ultrathin fullerene films as high-resolution molecular resists for low-voltage electron-beam lithography

Francis Gibbons, Alexander Robinson, Richard Palmer, Mayandithevar Manickam, Jon Preece

Research output: Contribution to journal › Article

21 Citations (Scopus)

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Finished
PLATFORM: Nanostructured Surfaces
Palmer, R., Guo, Q., Harrison, R., Heath, J., Jones, I., Li, Z., Moss, P. & Robinson, A.
Engineering & Physical Science Research Council
1/12/02 → 31/05/07
Project: Research Councils