Towards automation in AFM based nanomanipulation and electron beam indjuced deposition for microstructuring

F Krohs, T Luttermann, C Stolle, S Fatikow, EB Brousseau, Stefan Dimov

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	Fourth international conference on multi-material micro manufacture, 1/01/08
Publication status	Published - 1 Jan 2008

Cite this

@inproceedings{6040db6e0a64494fae47931828ace9c1,

title = "Towards automation in AFM based nanomanipulation and electron beam indjuced deposition for microstructuring",

author = "F Krohs and T Luttermann and C Stolle and S Fatikow and EB Brousseau and Stefan Dimov",

year = "2008",

month = jan,

day = "1",

language = "English",

booktitle = "Fourth international conference on multi-material micro manufacture, 1/01/08",

}