Tools and processes for MEMS and nanotechnology

Philip Prewett, SE Huq, Michael Ward

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 12 Mar 2001
Event	Proceedings of Lithography for Semiconductor Manufacturing II, Proc SPIE 4404 (invited) - Duration: 12 Mar 2001 → …

Conference	Proceedings of Lithography for Semiconductor Manufacturing II, Proc SPIE 4404 (invited)
Period	12/03/01 → …

Cite this

@conference{a43aefc5cdef41228aeb10eccd8db9fa,

title = "Tools and processes for MEMS and nanotechnology",

author = "Philip Prewett and SE Huq and Michael Ward",

year = "2001",

month = mar,

day = "12",

language = "English",

note = "Proceedings of Lithography for Semiconductor Manufacturing II, Proc SPIE 4404 (invited) ; Conference date: 12-03-2001",

}