The mechanistic detail of electromagnetic power transmission by metal embedded mask (MEM) for evanescent nearfield optical lithography (ENFOL)

Baah Sefa-Ntiri, Michael Ward, Philip Prewett

Research output: Contribution to conference (unpublished)Abstract

Original languageEnglish
Publication statusPublished - 25 Nov 2005
EventOptics in the South East 2005 -
Duration: 25 Nov 2005 → …


ConferenceOptics in the South East 2005
Period25/11/05 → …

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