The mechanistic detail of electromagnetic power transmission by metal embedded mask (MEM) for evanescent nearfield optical lithography (ENFOL)

Baah Sefa-Ntiri; Michael Ward; Philip Prewett

The mechanistic detail of electromagnetic power transmission by metal embedded mask (MEM) for evanescent nearfield optical lithography (ENFOL)

Baah Sefa-Ntiri, Michael Ward, Philip Prewett

Mechanical Engineering

Research output: Contribution to conference (unpublished) › Abstract

Original language	English
Publication status	Published - 25 Nov 2005
Event	Optics in the South East 2005 - Duration: 25 Nov 2005 → …

Conference

Conference	Optics in the South East 2005
Period	25/11/05 → …

Cite this

@conference{b4ecca4609f443978d0205e21052b9d5,

title = "The mechanistic detail of electromagnetic power transmission by metal embedded mask (MEM) for evanescent nearfield optical lithography (ENFOL)",

author = "Baah Sefa-Ntiri and Michael Ward and Philip Prewett",

year = "2005",

month = nov,

day = "25",

language = "English",

note = "Optics in the South East 2005 ; Conference date: 25-11-2005",

}