@conference{fddb1d21d07b47b5808615e41624bf97,
title = "The Mechanical Behaviour of Silicon Diaphragms for Micromachined Capacitive Pressure Sensor",
keywords = "orthotropic properties, circular diaphragm, capacitive pressure sensors, silicon",
author = "Juan Ren and David Cheneler and Michael Ward and P Kinnell",
year = "2009",
month = jan,
day = "1",
doi = "10.4028/www.scientific.net/AST.54.422",
language = "English",
pages = "422--427",
note = "3rd International Conference on Smart Materials, Structures and Systems, Jun 08-13, 2008. Acireale, Italy ; Conference date: 01-01-2009",
}