The experiment to study the behaviour of microfabricated silicon diaphragms at 900C

Juan Ren, Michael Ward, P kinnell, M Gear, R Cradock

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Publication status	Published - 17 Oct 2009
Event	35th International Conference on Micro & Nano Engineering (MNE09) - Duration: 17 Oct 2009 → …

Conference	35th International Conference on Micro & Nano Engineering (MNE09)
Period	17/10/09 → …

Cite this

@conference{e43dbd488bd748f293deb2afd374d76b,

title = "The experiment to study the behaviour of microfabricated silicon diaphragms at 900C",

author = "Juan Ren and Michael Ward and P kinnell and M Gear and R Cradock",

year = "2009",

month = oct,

day = "17",

language = "English",

note = "35th International Conference on Micro & Nano Engineering (MNE09) ; Conference date: 17-10-2009",

}