The effects of dwell time on focused ion beam machining of silicon

Aydin Sabouri, Carl Anthony, James Bowen, Philip Prewett

Research output: Contribution to journal › Article › peer-review

6 Citations (Scopus)

15 Downloads (Pure)

Original language	English
Pages (from-to)	24-26
Journal	Microelectronic Engineering
DOIs	https://doi.org/10.1016/j.mee.2014.02.025
Publication status	Published - 2014

Access to Document

@article{ed14828a2a8f4cce90aee5c33ef67e3d,

title = "The effects of dwell time on focused ion beam machining of silicon",

author = "Aydin Sabouri and Carl Anthony and James Bowen and Philip Prewett",

year = "2014",

doi = "10.1016/j.mee.2014.02.025",

language = "English",

pages = "24--26",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}