The dielectric properties of some ceramic substrate materials at terahertz frequencies

Mingsheng Ma, Yi Wang, Miguel Navarro-Cia, Feng Liu, Faqiang Zhang, Zhifu Liu, Yongxiang Li, S. M. Hanham, Zhang-cheng Hao

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The terahertz (THz) dielectric constant (ε r ') and dielectric loss tangent (tanδ) of the commercial LTCC materials (Ferro A6M and DuPont 951), Al 2O 3 (ceramic and single crystal), AlN and β-Si 3N 4 ceramics were measured using a vector network analyzer (VNA) over the frequency range of 140–220 GHz and a time-domain spectrometer (TDS) from 0.2 to 1.0 THz. The results from the two instruments are compared with the literature and show good agreement and consistency. For Ferro A6M, ε r ' = 6.06, tanδ = 0.012 at 1.0 THz. For DuPont 951, ε r ' = 7.67, tanδ = 0.097 at 1.0 THz. For Al 2O 3 ceramic and single crystal, the measured THz dielectric properties are consistent with the reported works. The dielectric constant of AlN (ε r ' = 8.85) and β-Si 3N 4r ' = 8.41) ceramics in the THz region is a little lower than those reported for the MHz to GHz region. These results provide valuable and much needed reference information for device designers and material scientists.

Original languageEnglish
Pages (from-to)4424-4428
Number of pages5
JournalJournal of the European Ceramic Society
Issue number14
Early online date6 Jun 2019
Publication statusPublished - Nov 2019


  • Ceramic substrate materials
  • Dielectric properties
  • Terahertz band

ASJC Scopus subject areas

  • Ceramics and Composites
  • Materials Chemistry


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