Synthesis and characterization of W reinforced carbon coatings produced by Combined Magnetron Sputtering and Ion Implantation technique

C Ruset; E Grigore; C Luculescu; Xiao-Ying Li; Hanshan Dong

doi:10.1016/j.tsf.2011.01.376

Synthesis and characterization of W reinforced carbon coatings produced by Combined Magnetron Sputtering and Ion Implantation technique

C Ruset, E Grigore, C Luculescu, Xiao-Ying Li, Hanshan Dong

Metallurgy and Materials

Research output: Contribution to journal › Article

7 Citations (Scopus)

Abstract

W-containing carbon coatings were deposited on plain carbon steel and titanium substrates by Combined Magnetron Sputtering and Ion Implantation (CMSII) technique. A target made of fine grain graphite with cylindrical tungsten pins mounted in the area of maximum sputtering rate was used. High voltage pulses (-30 kV, 20 mu s, and 25 Hz) were superposed over the DC bias. By adjusting the processing parameters nanocomposite nc-WC1-x/a-C coatings with a W content from 20 to 45 at.%, with a hardness of 12-22 GPa and a friction coefficient in the range of 0.12-0.22 were produced. These coatings have a thickness of 10-13 mu m, good wear resistance and a good thermal stability up to 673 K. (C) 2011 Elsevier B.V. All rights reserved.

Original language	English
Pages (from-to)	4045-4048
Number of pages	4
Journal	Thin Solid Films
Volume	519
Issue number	12
DOIs	https://doi.org/10.1016/j.tsf.2011.01.376
Publication status	Published - 1 Apr 2011

Keywords

Ion implantation
Carbon
Tribology
Magnetron sputtering
Tungsten

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10.1016/j.tsf.2011.01.376

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title = "Synthesis and characterization of W reinforced carbon coatings produced by Combined Magnetron Sputtering and Ion Implantation technique",

abstract = "W-containing carbon coatings were deposited on plain carbon steel and titanium substrates by Combined Magnetron Sputtering and Ion Implantation (CMSII) technique. A target made of fine grain graphite with cylindrical tungsten pins mounted in the area of maximum sputtering rate was used. High voltage pulses (-30 kV, 20 mu s, and 25 Hz) were superposed over the DC bias. By adjusting the processing parameters nanocomposite nc-WC1-x/a-C coatings with a W content from 20 to 45 at.%, with a hardness of 12-22 GPa and a friction coefficient in the range of 0.12-0.22 were produced. These coatings have a thickness of 10-13 mu m, good wear resistance and a good thermal stability up to 673 K. (C) 2011 Elsevier B.V. All rights reserved.",

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author = "C Ruset and E Grigore and C Luculescu and Xiao-Ying Li and Hanshan Dong",

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TY - JOUR

T1 - Synthesis and characterization of W reinforced carbon coatings produced by Combined Magnetron Sputtering and Ion Implantation technique

AU - Ruset, C

AU - Grigore, E

AU - Luculescu, C

AU - Li, Xiao-Ying

AU - Dong, Hanshan

PY - 2011/4/1

Y1 - 2011/4/1

N2 - W-containing carbon coatings were deposited on plain carbon steel and titanium substrates by Combined Magnetron Sputtering and Ion Implantation (CMSII) technique. A target made of fine grain graphite with cylindrical tungsten pins mounted in the area of maximum sputtering rate was used. High voltage pulses (-30 kV, 20 mu s, and 25 Hz) were superposed over the DC bias. By adjusting the processing parameters nanocomposite nc-WC1-x/a-C coatings with a W content from 20 to 45 at.%, with a hardness of 12-22 GPa and a friction coefficient in the range of 0.12-0.22 were produced. These coatings have a thickness of 10-13 mu m, good wear resistance and a good thermal stability up to 673 K. (C) 2011 Elsevier B.V. All rights reserved.

AB - W-containing carbon coatings were deposited on plain carbon steel and titanium substrates by Combined Magnetron Sputtering and Ion Implantation (CMSII) technique. A target made of fine grain graphite with cylindrical tungsten pins mounted in the area of maximum sputtering rate was used. High voltage pulses (-30 kV, 20 mu s, and 25 Hz) were superposed over the DC bias. By adjusting the processing parameters nanocomposite nc-WC1-x/a-C coatings with a W content from 20 to 45 at.%, with a hardness of 12-22 GPa and a friction coefficient in the range of 0.12-0.22 were produced. These coatings have a thickness of 10-13 mu m, good wear resistance and a good thermal stability up to 673 K. (C) 2011 Elsevier B.V. All rights reserved.

KW - Ion implantation

KW - Carbon

KW - Tribology

KW - Magnetron sputtering

KW - Tungsten

U2 - 10.1016/j.tsf.2011.01.376

DO - 10.1016/j.tsf.2011.01.376

M3 - Article

VL - 519

SP - 4045

EP - 4048

JO - Thin Solid Films

JF - Thin Solid Films

IS - 12

ER -

Synthesis and characterization of W reinforced carbon coatings produced by Combined Magnetron Sputtering and Ion Implantation technique

Abstract

Keywords

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