Surface roughness comparison between SU-8 and silicon microcomponents

Kyle Jiang, [No Value] [No Value], Graham Davies

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	221-228
Number of pages	8
Publication status	Published - 25 Nov 2005
Event	Proceedings of 2005 Lamdamap International Conference - Duration: 25 Nov 2005 → …

Conference	Proceedings of 2005 Lamdamap International Conference
Period	25/11/05 → …

Cite this

@conference{1723db386bfb41dd85513645dadf86c4,

title = "Surface roughness comparison between SU-8 and silicon microcomponents",

author = "Kyle Jiang and \{[No Value]\}, \{[No Value]\} and Graham Davies",

year = "2005",

month = nov,

day = "25",

language = "English",

pages = "221--228",

note = "Proceedings of 2005 Lamdamap International Conference ; Conference date: 25-11-2005",

}