Supercritically-dried porous silicon powders with surface areas exceeding 1000 m2/g

A Loni, Leigh Canham, Thomas Defforge, Gael Gautier

Research output: Contribution to journalArticlepeer-review

23 Citations (Scopus)


Porous silicon micro-particulates have been harvested after electrochemical anodization of lightly-doped p-type silicon wafers in hydrofluoric acid electrolyte containing sulfuric acid as an additive. Post-anodization, significantly higher internal surface areas per unit mass have been realized by utilizing super-critical drying with CO2 solvent instead of air-drying, with up to 1125 m2/g being achieved. Correspondingly higher pore volumes are also evident (>1 cm3/g) and, with average pore diameters ranging between 3–4 nm, a higher micropore content is made accessible. It is proposed that the improvements achieved through super-critical drying indicate that the higher density of micropores expected from the choice of wafer resistivity and electrolyte composition (their presence being confirmed through analysis of the adsorption-desorption isotherms) is facilitated through a higher degree of integrity being maintained within the etched pore structure during electrolyte removal.
Original languageEnglish
Pages (from-to)P289-P292
Number of pages4
JournalECS Journal of Solid State Science and Technology
Issue number8
Publication statusPublished - 28 May 2015


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