Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

David Glynn, Tianhao He, Jeff Powell, Yingtao Tian, Xiaobang Shang, Michael J. Lancaster

Research output: Chapter in Book/Report/Conference proceedingConference contribution


Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

Original languageEnglish
Title of host publicationEuMIC 2016 - 11th European Microwave Integrated Circuits Conference
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Electronic)9782874870446
Publication statusE-pub ahead of print - 8 Dec 2016
Event11th European Microwave Integrated Circuits Conference, EuMIC 2016 - London, United Kingdom
Duration: 3 Oct 20164 Oct 2016


Conference11th European Microwave Integrated Circuits Conference, EuMIC 2016
Country/TerritoryUnited Kingdom


  • micromachining
  • SU-8
  • waveguide

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Instrumentation


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