Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

David Glynn; Tianhao He; Jeff Powell; Yingtao Tian; Xiaobang Shang; Michael J. Lancaster

doi:10.1109/EuMIC.2016.7777580

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

David Glynn, Tianhao He, Jeff Powell, Yingtao Tian, Xiaobang Shang, Michael J. Lancaster

Electronic, Electrical and Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

Original language	English
Title of host publication	EuMIC 2016 - 11th European Microwave Integrated Circuits Conference
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	417-420
Number of pages	4
ISBN (Electronic)	9782874870446
DOIs	https://doi.org/10.1109/EuMIC.2016.7777580
Publication status	E-pub ahead of print - 8 Dec 2016
Event	11th European Microwave Integrated Circuits Conference, EuMIC 2016 - London, United Kingdom Duration: 3 Oct 2016 → 4 Oct 2016

Conference

Conference	11th European Microwave Integrated Circuits Conference, EuMIC 2016
Country/Territory	United Kingdom
City	London
Period	3/10/16 → 4/10/16

Keywords

micromachining
SU-8
waveguide

ASJC Scopus subject areas

Electrical and Electronic Engineering
Instrumentation

Access to Document

10.1109/EuMIC.2016.7777580

Micromachined Circuits For Terahertz Communications
Lancaster, M. (Principal Investigator), Constantinou, C. (Co-Investigator), Dimov, S. (Co-Investigator), Feresidis, A. (Co-Investigator), Gardner, P. (Co-Investigator), Cherniakov, M. (Co-Investigator), Gashinova, M. (Co-Investigator) & Huang, F. (Co-Investigator)
Engineering & Physical Science Research Council
22/06/15 → 22/12/18
Project: Research

Cite this

Glynn, D., He, T., Powell, J., Tian, Y., Shang, X., & Lancaster, M. J. (2016). Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. In EuMIC 2016 - 11th European Microwave Integrated Circuits Conference (pp. 417-420). Article 7777580 Institute of Electrical and Electronics Engineers (IEEE). Advance online publication. https://doi.org/10.1109/EuMIC.2016.7777580

@inproceedings{11d89c83deaa4187872333d0395d808f,

title = "Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology",

abstract = "Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.",

keywords = "micromachining, SU-8, waveguide",

author = "David Glynn and Tianhao He and Jeff Powell and Yingtao Tian and Xiaobang Shang and Lancaster, {Michael J.}",

year = "2016",

month = dec,

day = "8",

doi = "10.1109/EuMIC.2016.7777580",

language = "English",

pages = "417--420",

booktitle = "EuMIC 2016 - 11th European Microwave Integrated Circuits Conference",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

note = "11th European Microwave Integrated Circuits Conference, EuMIC 2016 ; Conference date: 03-10-2016 Through 04-10-2016",

}

Glynn, D, He, T, Powell, J, Tian, Y, Shang, X & Lancaster, MJ 2016, Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. in EuMIC 2016 - 11th European Microwave Integrated Circuits Conference., 7777580, Institute of Electrical and Electronics Engineers (IEEE), pp. 417-420, 11th European Microwave Integrated Circuits Conference, EuMIC 2016, London, United Kingdom, 3/10/16. https://doi.org/10.1109/EuMIC.2016.7777580

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. / Glynn, David; He, Tianhao; Powell, Jeff et al.
EuMIC 2016 - 11th European Microwave Integrated Circuits Conference. Institute of Electrical and Electronics Engineers (IEEE), 2016. p. 417-420 7777580.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

TY - GEN

T1 - Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

AU - Glynn, David

AU - He, Tianhao

AU - Powell, Jeff

AU - Tian, Yingtao

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

PY - 2016/12/8

Y1 - 2016/12/8

N2 - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

AB - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

KW - micromachining

KW - SU-8

KW - waveguide

UR - http://www.scopus.com/inward/record.url?scp=85010332986&partnerID=8YFLogxK

U2 - 10.1109/EuMIC.2016.7777580

DO - 10.1109/EuMIC.2016.7777580

M3 - Conference contribution

AN - SCOPUS:85010332986

SP - 417

EP - 420

BT - EuMIC 2016 - 11th European Microwave Integrated Circuits Conference

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 11th European Microwave Integrated Circuits Conference, EuMIC 2016

Y2 - 3 October 2016 through 4 October 2016

ER -

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

Abstract

Conference

Keywords

ASJC Scopus subject areas

Access to Document

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Projects

Micromachined Circuits For Terahertz Communications

Cite this