Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

David Glynn; Tianhao He; Jeffrey Powell; Yingtao Tian; Xiaobang Shang; Michael J. Lancaster

doi:10.1109/EuMC.2016.7824601

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

David Glynn, Tianhao He, Jeffrey Powell, Yingtao Tian, Xiaobang Shang, Michael J. Lancaster

Electronic, Electrical and Systems Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

3 Citations (Scopus)

Abstract

Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

Original language	English
Title of host publication	European Microwave Week 2016 Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1346-1349
ISBN (Print)	978-2-87487-042-2
DOIs	https://doi.org/10.1109/EuMC.2016.7824601
Publication status	Published - Feb 2017
Event	2016 46th European Microwave Conference (EuMC) - London, United Kingdom Duration: 4 Oct 2016 → 6 Oct 2016

Conference

Conference	2016 46th European Microwave Conference (EuMC)
Period	4/10/16 → 6/10/16

Access to Document

10.1109/EuMC.2016.7824601

Micromachined Circuits For Terahertz Communications
Lancaster, M. (Principal Investigator), Constantinou, C. (Co-Investigator), Dimov, S. (Co-Investigator), Feresidis, A. (Co-Investigator), Gardner, P. (Co-Investigator), Cherniakov, M. (Co-Investigator), Gashinova, M. (Co-Investigator) & Huang, F. (Co-Investigator)
Engineering & Physical Science Research Council
22/06/15 → 22/12/18
Project: Research

Cite this

@inproceedings{26a7cdc666a24c8dabe229cf199b0626,

title = "Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology",

abstract = "Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.",

author = "David Glynn and Tianhao He and Jeffrey Powell and Yingtao Tian and Xiaobang Shang and Lancaster, {Michael J.}",

year = "2017",

month = feb,

doi = "10.1109/EuMC.2016.7824601",

language = "English",

isbn = "978-2-87487-042-2",

pages = "1346--1349",

booktitle = "European Microwave Week 2016 Conference Proceedings",

publisher = "Institute of Electrical and Electronics Engineers (IEEE)",

note = "2016 46th European Microwave Conference (EuMC) ; Conference date: 04-10-2016 Through 06-10-2016",

}

Glynn, D, He, T, Powell, J, Tian, Y, Shang, X & Lancaster, MJ 2017, Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology. in European Microwave Week 2016 Conference Proceedings. Institute of Electrical and Electronics Engineers (IEEE), pp. 1346-1349, 2016 46th European Microwave Conference (EuMC), 4/10/16. https://doi.org/10.1109/EuMC.2016.7824601

TY - GEN

T1 - Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

AU - Glynn, David

AU - He, Tianhao

AU - Powell, Jeffrey

AU - Tian, Yingtao

AU - Shang, Xiaobang

AU - Lancaster, Michael J.

PY - 2017/2

Y1 - 2017/2

N2 - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

AB - Rectangular waveguides are fundamental structures for the transmission of signals at millimetre and submillimetre wavelengths. This paper describes the design and measured results for two rectangular waveguides based on layered SU-8 photoresist micromachining technology, with double-layer fabrication techniques to minimise the air gaps between layers. A brief description of the SU-8 photoresist micromachining procedure is given in the paper. One waveguide is demonstrated for the WR-3 band from 220 GHz to 325 GHz the other is for the WR-6 band 120 GHz to 170 GHz both are made of layered SU-8 with a 3 piece construction. Both waveguides have novel bends in order to connect to the measurement apparatus. The measured performance is presented and compared to conventional machined metal waveguide structures. The measured insertion loss for the SU-8 waveguides in both bands is better than 0.03 dB/mm.

U2 - 10.1109/EuMC.2016.7824601

DO - 10.1109/EuMC.2016.7824601

M3 - Conference contribution

SN - 978-2-87487-042-2

SP - 1346

EP - 1349

BT - European Microwave Week 2016 Conference Proceedings

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 2016 46th European Microwave Conference (EuMC)

Y2 - 4 October 2016 through 6 October 2016

ER -

Submillimetre rectangular waveguides based on SU-8 photoresist micromachining technology

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Micromachined Circuits For Terahertz Communications

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