Stress isolation chip for a resonant pressure sensor

Peter Kinnell, Michael Ward, R Craddock

Research output: Contribution to conference (unpublished) › Paper

Original language	English
Pages	256-257
Number of pages	2
Publication status	Published - 12 Mar 2003
Event	Proceedings of the 17th European Conference on Solid-State Transducer - Duration: 12 Mar 2003 → …

Conference	Proceedings of the 17th European Conference on Solid-State Transducer
Period	12/03/03 → …

Cite this

@conference{08ea0a5087a24a2fbf92a7e0848fdb87,

title = "Stress isolation chip for a resonant pressure sensor",

author = "Peter Kinnell and Michael Ward and R Craddock",

year = "2003",

month = mar,

day = "12",

language = "English",

pages = "256--257",

note = "Proceedings of the 17th European Conference on Solid-State Transducer ; Conference date: 12-03-2003",

}