Stress-induced curvature of focused ion beam fabricated microcantilevers

Philip Prewett, Carl Anthony, David Cheneler, Michael Ward

Research output: Contribution to journalArticle

12 Citations (Scopus)


Microcantilevers with very low spring constants, as required to measure the short-range Casimir force, can be fabricated by focused ion beam thinning of conventional atomic force microscope cantilevers, but the resulting beams have a stress-induced curvature. This can be explained by consideration of the implanted gallium ions and associated damage effects in the etched surface. The problem can be overcome by using a complementary etch method in which top and bottom surfaces of the microcantilever are etched by the same amount.
Original languageEnglish
Pages (from-to)25-28
Number of pages4
JournalMicro & Nano Letters
Issue number1
Publication statusPublished - 1 Jan 2008


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