Fingerprint
Dive into the research topics of 'Spin-on carbon based on fullerene derivatives as hardmask materials for high-aspect-ratio etching'. Together they form a unique fingerprint.- Sort by
- Weight
- Alphabetically
Spin-on carbon based on fullerene derivatives as hardmask materials for high-aspect-ratio etching
Andreas Frommhold, Richard Palmer, Alexander Robinson, James Bowen (Contributor)
Research output: Contribution to journal › Article › peer-review
4
Citations
(Scopus)
770
Downloads
(Pure)