Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	SVC - 56th Annual Technical Conference Proceedings
Publication status	Published - 2013

Cite this

@inproceedings{f9d8bc2036844070a71eb48628fbb3f6,

title = "Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode",

author = "Elliott, \{S. M.\} and Attallah, \{M. M.\} and K. Cooke and K. Essa and D. Ievlev and J. Simkin and White, \{E. K.\}",

year = "2013",

language = "English",

booktitle = "SVC - 56th Annual Technical Conference Proceedings",

}