Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode

S. M. Elliott, M. M. Attallah, K. Cooke, K. Essa, D. Ievlev, J. Simkin, E. K. White

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationSVC - 56th Annual Technical Conference Proceedings
Publication statusPublished - 2013

Cite this