Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode

S. M. Elliott, M. M. Attallah, K. Cooke, K. Essa, D. Ievlev, J. Simkin, E. K. White

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Original language	English
Title of host publication	SVC - 56th Annual Technical Conference Proceedings
Publication status	Published - 2013

Cite this

@inproceedings{f9d8bc2036844070a71eb48628fbb3f6,

title = "Simulation of the Erosion Groove and Vapor Distribution of a Linear Magnetron Sputtering Cathode",

author = "Elliott, {S. M.} and Attallah, {M. M.} and K. Cooke and K. Essa and D. Ievlev and J. Simkin and White, {E. K.}",

year = "2013",

language = "English",

booktitle = "SVC - 56th Annual Technical Conference Proceedings",

}