Simple ALD process for ε-Fe2O3 thin films

A. Tanskanen, O. Mustonen, M. Karppinen

Research output: Contribution to journal › Article › peer-review

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@article{a11e73499ccc4a12a0936e6ae59d3c87,

title = "Simple ALD process for ε-Fe2O3 thin films",

author = "A. Tanskanen and O. Mustonen and M. Karppinen",

year = "2017",

month = may,

day = "15",

doi = "10.1063/1.4983038",

language = "English",

volume = "5",

journal = "APL Materials",

issn = "2166-532X",

publisher = "American Institute of Physics Publising LLC",

}