Silicon comb-drive actuators for low-temperature tuning of superconducting microwave circuits

MJ Prest, Yi Wang, Frederick Huang, Michael Lancaster

Research output: Contribution to journalArticlepeer-review

5 Citations (Scopus)

Abstract

Tuning of a superconducting microwave resonator, operating at 77 K, is demonstrated using a silicon micro-machined comb-drive actuator. Thermal expansion coefficient differences between the silicon actuator and the MgO substrate are accommodated by the use of stress absorbing springs. A tuning range of 4.6% is demonstrated for a superconducting microwave resonator with a frequency just below 6 GHz.
Original languageEnglish
Pages (from-to)125003-
JournalJournal of Micromechanics and Microengineering
Volume18
Issue number12
Early online date23 Oct 2008
DOIs
Publication statusPublished - 1 Dec 2008

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