Research and evaluation of a high temperature pressure sensor chip

Z Jiang, L Zhao, Y Zhao, Philip Prewett, Kyle Jiang

Research output: Contribution to conference (unpublished) › Paper

5 Citations (Scopus)

Original language	English
Pages	661-665
Number of pages	5
Publication status	Published - 17 Mar 2009
Event	2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Duration: 17 Mar 2009 → …

Conference	2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
Period	17/03/09 → …

Cite this

@conference{a976e3e707b54bba95ade38ea0d6551f,

title = "Research and evaluation of a high temperature pressure sensor chip",

author = "Z Jiang and L Zhao and Y Zhao and Philip Prewett and Kyle Jiang",

year = "2009",

month = mar,

day = "17",

language = "English",

pages = "661--665",

note = "2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems ; Conference date: 17-03-2009",

}