TY - JOUR
T1 - Recent developments in the fabrication of ordered nanostructure arrays based on nanosphere lithography.
AU - Wei, Xueyong
PY - 2010/11/1
Y1 - 2010/11/1
N2 - Since it was invented two decades ago, Nanosphere Lithography (NSL) has been widely studied as a low cost and flexible technique to fabricate nanostructures. Based on the registered patents and some selected papers, this review will discuss recent developments of different NSL strategies for the fabrication of ordered nanostructure arrays. The mechanism of self-assembly process and the techniques for preparing the self-assembled nanosphere template are first briefly introduced. The nanosphere templates are used either as shadow masks or as moulds for pattern transfer. Much more work now combines NSL with other lithographic techniques and material growth methods to form novel nanostructures of complex shape or various materials. Hence, this review finally gives a discussion on some future directions in NSL study.
AB - Since it was invented two decades ago, Nanosphere Lithography (NSL) has been widely studied as a low cost and flexible technique to fabricate nanostructures. Based on the registered patents and some selected papers, this review will discuss recent developments of different NSL strategies for the fabrication of ordered nanostructure arrays. The mechanism of self-assembly process and the techniques for preparing the self-assembled nanosphere template are first briefly introduced. The nanosphere templates are used either as shadow masks or as moulds for pattern transfer. Much more work now combines NSL with other lithographic techniques and material growth methods to form novel nanostructures of complex shape or various materials. Hence, this review finally gives a discussion on some future directions in NSL study.
U2 - 10.2174/187221010792483681
DO - 10.2174/187221010792483681
M3 - Review article
C2 - 20670212
SN - 1872-2105
VL - 4
SP - 194
EP - 204
JO - Recent patents on nanotechnology
JF - Recent patents on nanotechnology
IS - 3
ER -