Quantitative evaluation of electron beam writing in passivated gold nanoclusters

TR Bedson; Richard Palmer; TE Jenkins; DJ Hayton; Jess Wilcoxon

doi:10.1063/1.1354154

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

TR Bedson
, Richard Palmer
, TE Jenkins
, DJ Hayton
, Jess Wilcoxon

Physics and Astronomy

Research output: Contribution to journal › Letter

23 Citations (Scopus)

Abstract

We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

Original language	English
Pages (from-to)	1921-1923
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	13
DOIs	https://doi.org/10.1063/1.1354154
Publication status	Published - 1 Jan 2001

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10.1063/1.1354154

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title = "Quantitative evaluation of electron beam writing in passivated gold nanoclusters",

abstract = "We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.",

author = "TR Bedson and Richard Palmer and TE Jenkins and DJ Hayton and Jess Wilcoxon",

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AU - Palmer, Richard

AU - Jenkins, TE

AU - Hayton, DJ

AU - Wilcoxon, Jess

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Y1 - 2001/1/1

N2 - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

AB - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

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U2 - 10.1063/1.1354154

DO - 10.1063/1.1354154

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VL - 78

SP - 1921

EP - 1923

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

ER -

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

Abstract

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