Quantitative evaluation of electron beam writing in passivated gold nanoclusters

TR Bedson; Richard Palmer; TE Jenkins; DJ Hayton; Jess Wilcoxon

doi:10.1063/1.1354154

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

TR Bedson, Richard Palmer, TE Jenkins, DJ Hayton, Jess Wilcoxon

Physics and Astronomy

Research output: Contribution to journal › Letter

23 Citations (Scopus)

Abstract

We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

Original language	English
Pages (from-to)	1921-1923
Number of pages	3
Journal	Applied Physics Letters
Volume	78
Issue number	13
DOIs	https://doi.org/10.1063/1.1354154
Publication status	Published - 1 Jan 2001

Access to Document

10.1063/1.1354154

Cite this

@article{423de1e628ec48e0a253f7d7eae49531,

title = "Quantitative evaluation of electron beam writing in passivated gold nanoclusters",

abstract = "We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.",

author = "TR Bedson and Richard Palmer and TE Jenkins and DJ Hayton and Jess Wilcoxon",

year = "2001",

month = jan,

day = "1",

doi = "10.1063/1.1354154",

language = "English",

volume = "78",

pages = "1921--1923",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "13",

}

TY - JOUR

T1 - Quantitative evaluation of electron beam writing in passivated gold nanoclusters

AU - Bedson, TR

AU - Palmer, Richard

AU - Jenkins, TE

AU - Hayton, DJ

AU - Wilcoxon, Jess

PY - 2001/1/1

Y1 - 2001/1/1

N2 - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

AB - We report a quantitative investigation of direct electron beam writing in monolayer films of passivated gold nanoclusters. In this process, the passivating organic ligands are (partially) removed to create gold-based nanostructures. We report the fabrication of lines with width as narrow as 26 nm, while measurements of the linewidth as a function of dose allow us to obtain a quantitative measure of the sensitivity, for comparison with established negative tone resists. (C) 2001 American Institute of Physics.

UR - http://www.scopus.com/inward/record.url?scp=0035952789&partnerID=8YFLogxK

U2 - 10.1063/1.1354154

DO - 10.1063/1.1354154

M3 - Letter

SN - 0003-6951

VL - 78

SP - 1921

EP - 1923

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 13

ER -

Quantitative evaluation of electron beam writing in passivated gold nanoclusters

Abstract

Access to Document

Fingerprint

Cite this