TY - JOUR
T1 - Plastic embossing of 3D ceramic microstructures
AU - Su, Bo
AU - Button, Timothy
AU - Schneider, A
AU - Singleton, L
AU - Prewett, Philip
PY - 2002/8/1
Y1 - 2002/8/1
N2 - An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10-150 mum and aspect ratios of 3-10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed.
AB - An embossing method based on the viscous polymer processed (VPP) ceramic tape has been used to fabricate 3D ceramic microstructures with high aspect ratios. Examples of lead zirconate titanate (PZT) microrod arrays with feature sizes of 10-150 mum and aspect ratios of 3-10 have been demonstrated. Advantages of the embossing technique over conventional casting and moulding methods are discussed.
UR - http://www.scopus.com/inward/record.url?scp=0036693380&partnerID=8YFLogxK
U2 - 10.1007/s00542-001-0160-8
DO - 10.1007/s00542-001-0160-8
M3 - Article
SN - 1432-1858
VL - 8
SP - 359
EP - 362
JO - Microsystems Technology
JF - Microsystems Technology
ER -