Plasma etching of high-resolution features in a fullerene molecular resist

J. Manyam, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson

Research output: Chapter in Book/Report/Conference proceedingConference contribution

21 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of SPIE - The International Society for Optical Engineering
DOIs
Publication statusPublished - 2011

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