Original language | Undefined/Unknown |
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Title of host publication | Proceedings of SPIE - The International Society for Optical Engineering |
DOIs | |
Publication status | Published - 2011 |
Plasma etching of high-resolution features in a fullerene molecular resist
J. Manyam, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson
Research output: Chapter in Book/Report/Conference proceeding › Conference contribution
21
Citations
(Scopus)