Permittivity and loss characteristics of SU8-quartz composite photoresist at THz frequencies

Jung-Mu Kim, Michael Lancaster, Ignacio Llamas-Garro, Moises I Espinosa-Espinosa, Maolong Ke, Marcos T de Melo

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Abstract

An SU8-quartz composite photoresist has been fabricated and characterized from 1.2 to 1.4 THz; the material contains quartz particles from 0 to 50 wt%. The composite can reduce the inherent losses of SU8 photoresist at terahertz frequencies. Calculated and measured data is presented and compared to SU8 without quartz inclusions. The results show a reduction in losses and an increase in permittivity in the composite material as the density of quartz particles increases. This initial experiment proves the possibility of modifying the electrical parameters of SU8; increasing the quartz density of the composite will modify these parameters further at THz frequencies.
Original languageEnglish
Pages (from-to)2329–2330
JournalMicrowave and Optical Technology Letters
Volume58
Issue number10
Early online date27 Jul 2016
DOIs
Publication statusPublished - Oct 2016

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