Performance of RF MEMS Switches at Low Temperatures

Hieng Su, I LLamas-Garro, Michael Lancaster, Martin Prest, JH Park, JM Kim, CS Baek, YK Kim

Research output: Contribution to journalArticlepeer-review

14 Citations (Scopus)
236 Downloads (Pure)


The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature.
Original languageEnglish
Pages (from-to)1219-1221
Number of pages3
JournalElectronics Letters
Issue number21
Publication statusPublished - 1 Jan 2006


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